Extreme-Low-Power Thermal Convective Inclination Sensor Based on CNT Sensing Element
نویسندگان
چکیده
This paper presents the operation principle and development of a micromachined thermal convective inclination sensor using Carbon Nanotube (CNT) sensing elements. The operation principle of this type of inclination sensor is based on sensing the convection of fluids in a micro chamber. External motion will lead to redistribution of the temperature profile around a heater and will be asymmetric. The temperature difference over two detectors is converted into resistance difference as sensed by the CNT sensing elements. The inclination sensors developed by our group using the above sensing principle have shown very good sensitivity, and the power consumption for these CNT sensors is extremely small (around μW ). We have demonstrated that such a sensor can be built using a glass substrate bonded with a PDMS cover to encapsulate liquid as the convection medium.
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